A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

  • Qinglin Zhang, Xingcheng Xiao, Yang-Tse Cheng, Mark W. Verbrugge
  • Applied Physics Letters, August 2014, American Institute of Physics
  • DOI: 10.1063/1.4892539

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http://dx.doi.org/10.1063/1.4892539

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