A micron resolution optical scanner for characterization of silicon detectors

R. A. Shukla, S. R. Dugad, C. S. Garde, A. V. Gopal, S. K. Gupta, S. S. Prabhu
  • Review of Scientific Instruments, February 2014, American Institute of Physics
  • DOI: 10.1063/1.4863880

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http://dx.doi.org/10.1063/1.4863880

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