Study of tungsten filament aging in hot-wire chemical vapor deposition with silacyclobutane as a source gas and the H2 etching effect

Ling Tong, Chris E. Sveen, Yujun Shi
  • Journal of Applied Physics, June 2008, American Institute of Physics
  • DOI: 10.1063/1.2949278

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http://dx.doi.org/10.1063/1.2949278

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