Swift heavy-ion-induced epitaxial crystallization of buried Si3N4 layer

T. Som, B. Satpati, O. P. Sinha, D. Kanjilal
  • Journal of Applied Physics, July 2005, American Institute of Physics
  • DOI: 10.1063/1.1949275

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http://dx.doi.org/10.1063/1.1949275

The following have contributed to this page: Biswarup Satpati