Atomic layer deposition of high-κ dielectrics on nitrided silicon surfaces

Ye Xu, Charles B. Musgrave
  • Applied Physics Letters, May 2005, American Institute of Physics
  • DOI: 10.1063/1.1922080

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1063/1.1922080

The following have contributed to this page: Charles Musgrave

In partnership with: