Dry thermal oxidation of a graded SiGe layer

Y. S. Lim, J. S. Jeong, J. Y. Lee, H. S. Kim, H. K. Shon, H. K. Kim, D. W. Moon
  • Frontiers in Human Neuroscience, January 2001, American Institute of Physics
  • DOI: 10.1063/1.1415373

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