Maskless photolithography: Embossed photoresist as its own optical element

Kateri E. Paul, Tricia L. Breen, Joanna Aizenberg, George M. Whitesides
  • Applied Physics Letters, November 1998, American Institute of Physics
  • DOI: 10.1063/1.122621

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http://dx.doi.org/10.1063/1.122621

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