What is it about?
Ellipsometers measure the optical properties and thicknesses of thin-film materials by using light. However, commercial ellipsometers have limited lateral resolution up to tens-of-microns and exhibit very slow data acquisition beyond this resolution. This inhibits the effective utilization of ellipsometers for micron-scale structures which are abundant in today’s technology and research.
Photo by Pawel Czerwinski on Unsplash
Why is it important?
In our work, we demonstrate a patented, microscope-integrated ellipsometer which can measure areas as small as 2 microns wide with a record-fast data acquisition. This allows for highly accurate and fast optical characterization of micron-scale structures, and promises a paradigm shift in the capabilities of ellipsometry in industry and research. Importantly, our technology can be integrated with ordinary microscopes by addition of a few standard components, transforming the most fundamental imaging equipment into superior optical characterization instruments in an affordable manner.
Read the Original
This page is a summary of: Mapping spectroscopic micro-ellipsometry with sub-5 microns lateral resolution and simultaneous broadband acquisition at multiple angles, Review of Scientific Instruments, February 2023, American Institute of Physics, DOI: 10.1063/5.0123249.
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