What is it about?

In this paper, a dynamic model of the interaction of a sensor, multipole resonance probe (MRP), with plasma is established. If I am asked to use one sentence to describe this paper, I will say "think like an electron." The idea is simple: Basically, we treat plasma as a large number of free electrons and ions in the simulation. As the electrons can "see" the probe, by collecting the information of all the electrons, a realistic physics of the probe-plasma interaction is illustrated. The proposed scheme reveals the kinetic behavior of the plasma that is able to explain the influence of kinetic effects on the resonance structure. With the help of the kinetic model, an accurate prediction of the electron density and the electron temperature can be achieved.

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Why is it important?

This work provides the possibility for the experimenter to measure the electron density and the electron temperature simultaneously. Moreover, the accurate prediction from the kinetic simulation allows an adequate database, which can be used to support the real-time supervision and control of the plasma process via the MRP system.

Perspectives

It was a great pleasure to work with the co-authors of this paper. I really enjoyed our collaborations. The multipole resonance probe was proposed for over a decade. Many researchers have been contributed to improve this device and enhance the understanding of the interaction between the plasma and the probe. I am glad this article can provide some new insights to this topic.

Junbo Gong
Ruhr-Universitat Bochum

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This page is a summary of: Kinetic simulation of the ideal multipole resonance probe, Journal of Applied Physics, August 2022, American Institute of Physics, DOI: 10.1063/5.0098031.
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