What is it about?
The study establishes the methodology for analysis of the experimental data with two different experiments (XRD and EXAFS). There have been many studies that point to the formation and presence of a particular phase that is attributed to the ferroelectric property in these films. This paper estimates the phase fractions in mixed oxide of ultra-thin thickness of 10nm. The phases present are correlated with piezo-response force microscopy images of the domains formed in these films.
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Why is it important?
The paper provides a non- destructive analysis of the buried films and interfaces in a capacitor like stacks. Piezo-response force microscopy helped establish the ferroelectric domains in these ultra-thin atomic layer deposited films.
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This page is a summary of: Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films, Frontiers in Human Neuroscience, December 2020, American Institute of Physics,
DOI: 10.1063/5.0029611.
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