Polymerization related deformations in multilayer soft stamps for nanoimprint

M. Förthner, M. Papenheim, M. Rumler, F. Stumpf, L. Baier, M. Rommel, H.-C. Scheer, L. Frey
  • Journal of Applied Physics, October 2017, American Institute of Physics
  • DOI: 10.1063/1.5001463
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The following have contributed to this page: Dr. Mathias Rommel