Optoelectronic properties of ZnO film on silicon after SF6 plasma treatment and milliseconds annealing

S. Prucnal, Kun Gao, Shengqiang Zhou, Jiada Wu, Hua Cai, Ovidiu D. Gordan, Dietrich R. T. Zahn, G. Larkin, M. Helm, W. Skorupa
  • Applied Physics Letters, December 2014, American Institute of Physics
  • DOI: 10.1063/1.4903074
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The following have contributed to this page: Professor Dietrich RT Zahn