Controlling ion fluxes during reactive sputter-deposition of SnO2:F

Timo Jäger, Yaroslav E. Romanyuk, Ayodhya N. Tiwari, André Anders
  • Journal of Applied Physics, July 2014, American Institute of Physics
  • DOI: 10.1063/1.4887119
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The following have contributed to this page: Professor Andre Anders