Evidence for hydrogen two-level systems in atomic layer deposition oxides

M. S. Khalil, M. J. A. Stoutimore, S. Gladchenko, A. M. Holder, C. B. Musgrave, A. C. Kozen, G. Rubloff, Y. Q. Liu, R. G. Gordon, J. H. Yum, S. K. Banerjee, C. J. Lobb, K. D. Osborn
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4826253
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