Strain mapping of Si devices with stress memorization processing

  • J. Bruley, H. van Meer, A. Domenicucci, C. E. Murray, J. Rouviere
  • Applied Physics Letters, July 2013, American Institute of Physics
  • DOI: 10.1063/1.4816743

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http://dx.doi.org/10.1063/1.4816743

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