Heteroepitaxial Ge-on-Si by DC magnetron sputtering

Martin Steglich, Christian Patzig, Lutz Berthold, Frank Schrempel, Kevin Füchsel, Thomas Höche, Ernst-Bernhard Kley, Andreas Tünnermann
  • AIP Advances, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4813841
The author haven't yet claimed this publicationThe author haven't yet claimed this publication