Double oxide deposition and etching nanolithography for wafer-scale nanopatterning with high-aspect-ratio using photolithography

Jungho Seo, Hanchul Cho, Ju-kyung Lee, Jinyoung Lee, Ahmed Busnaina, HeaYeon Lee
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4813738