In situ analyses on negative ions in the indium-gallium-zinc oxide sputtering process

  • Junjun Jia, Yoshifumi Torigoshi, Yuzo Shigesato
  • Applied Physics Letters, July 2013, American Institute of Physics
  • DOI: 10.1063/1.4812668

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http://dx.doi.org/10.1063/1.4812668

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