Effect of high temperature deposition on CoSi2 phase formation

C. M. Comrie, H. Ahmed, D. Smeets, J. Demeulemeester, S. Turner, G. Van Tendeloo, C. Detavernier, A. Vantomme
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4811352
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