Contact resistivity reduction through interfacial layer doping in metal-interfacial layer-semiconductor contacts

Shashank Gupta, Prashanth Paramahans Manik, Ravi Kesh Mishra, Aneesh Nainani, Mathew C. Abraham, Saurabh Lodha
  • Journal of Applied Physics, June 2013, American Institute of Physics
  • DOI: 10.1063/1.4811340
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