Evolution of nanoripples on silicon by gas cluster-ion irradiation

Omar Lozano, Q. Y. Chen, B. P. Tilakaratne, H. W. Seo, X. M. Wang, P. V. Wadekar, P. V. Chinta, L. W. Tu, N. J. Ho, D. Wijesundera, W. K. Chu
  • AIP Advances, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4811171
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