Analysis of intrinsic hydrogenated amorphous silicon passivation layer growth for use in heterojunction silicon wafer solar cells by optical emission spectroscopy

Jia Ge, Zhi Peng Ling, Johnson Wong, Rolf Stangl, Armin G. Aberle, Thomas Mueller
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4810900