Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications

  • Emil H. Zin, W. H. Bang, E. Todd Ryan, Sean W. King, Choong-Un Kim
  • Applied Physics Letters, June 2013, American Institute of Physics
  • DOI: 10.1063/1.4809827

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http://dx.doi.org/10.1063/1.4809827

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