Mobility enhancement in amorphous InGaZnO thin-film transistors by Ar plasma treatment

Jung Han Kang, Edward Namkyu Cho, Chang Eun Kim, Min-Jung Lee, Su Jeong Lee, Jae-Min Myoung, Ilgu Yun
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4809727