Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion

D. P. Fenning, A. S. Zuschlag, M. I. Bertoni, B. Lai, G. Hahn, T. Buonassisi
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4808310