Interface trap characterization of atomic layer deposition Al2O3/GaN metal-insulator-semiconductor capacitors using optically and thermally based deep level spectroscopies

Christine M. Jackson, Aaron R. Arehart, Emre Cinkilic, Brian McSkimming, James S. Speck, Steven A. Ringel
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4808093