Nickel: A very fast diffuser in silicon

J. Lindroos, D. P. Fenning, D. J. Backlund, E. Verlage, A. Gorgulla, S. K. Estreicher, H. Savin, T. Buonassisi
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4807799