Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet beam

Alain Jody Corso, Paola Zuppella, Frank Barkusky, Klaus Mann, Matthias Müller, Piergiorgio Nicolosi, Marco Nardello, Maria Guglielmina Pelizzo
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4807644