The structure measurement of micro-electro-mechanical system devices by the optical feedback tomography technology

  • Chunxin Xu, Yidong Tan, Shulian Zhang, Shijie Zhao
  • Applied Physics Letters, June 2013, American Institute of Physics
  • DOI: 10.1063/1.4807283

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http://dx.doi.org/10.1063/1.4807283

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