Mechanical stress influence on electronic transport in low-k SiOC dielectric single damascene capacitor

  • Ya-Liang Yang, Tai-Fa Young, Ting-Chang Chang, Fu-Yen Shen, Jia-Haw Hsu, Tsung-Ming Tsai, Kuan-Chang Chang, Hisn-Lu Chen
  • Applied Physics Letters, May 2013, American Institute of Physics
  • DOI: 10.1063/1.4807010

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http://dx.doi.org/10.1063/1.4807010

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