Tilt of the columnar microstructure in off-normally deposited thin films using highly ionized vapor fluxes

V. Elofsson, D. Magnfält, M. Samuelsson, K. Sarakinos
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4804066
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The following have contributed to this page: Kostas Sarakinos