Impact of rapid thermal processing on oxygen precipitation in heavily arsenic and antimony doped Czochralski silicon

Xinpeng Zhang, Chao Gao, Maosen Fu, Xiangyang Ma, Jan Vanhellemont, Deren Yang
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4803061
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The following have contributed to this page: Jan Vanhellemont