On the growth kinetics of Ni(Pt) silicide thin films

J. Demeulemeester, D. Smeets, C. M. Comrie, N. P. Barradas, A. Vieira, C. Van Bockstael, C. Detavernier, K. Temst, A. Vantomme
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4802738