Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions

A. O. Eriksson, I. Zhirkov, M. Dahlqvist, J. Jensen, L. Hultman, J. Rosen
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4802433
The author haven't finished explaining this publicationThe author haven't finished explaining this publication
The following have contributed to this page: Martin Dahlqvist