Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric

Alexander C. Kozen, Marshall A. Schroeder, Kevin D. Osborn, C. J. Lobb, Gary W. Rubloff
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4801979
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