High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-κ insulators (κ = 2.0-2.5)

V. V. Afanas'ev, A. P. D. Nguyen, M. Houssa, A. Stesmans, Zs. Tőkei, M. R. Baklanov
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4801938
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