Ultrahigh throughput plasma processing of free standing silicon nanocrystals with lognormal size distribution

İlker Doğan, Nicolaas J. Kramer, René H. J. Westermann, Kateřina Dohnalová, Arno H. M. Smets, Marcel A. Verheijen, Tom Gregorkiewicz, Mauritius C. M. van de Sanden
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4799402
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