X-ray characterization techniques for the assessment of surface damage in crystalline wafers: A model study in AlN

M. Bobea, J. Tweedie, I. Bryan, Z. Bryan, A. Rice, R. Dalmau, J. Xie, R. Collazo, Z. Sitar
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4798352
The author haven't yet claimed this publicationThe author haven't yet claimed this publication