Etching damage and its recovery by soft X-ray irradiation observed in soft X-ray absorption spectra of TiO2 thin film

Keiji Sano, Takuya Kotaka, Retsuo Kawakami, Kikuo Tominaga, Yoshitaka Nakano, Masahito Niibe
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4798301
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