Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding

Osman El-Atwani, Sean Gonderman, Alexander DeMasi, Anastassiya Suslova, Justin Fowler, Mohamad El-Atwani, Karl Ludwig, Jean Paul Allain
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4797480