Contact resistance improvement by dielectric breakdown in semiconductor-dielectric-metal contact

Kausik Majumdar, Chris Hobbs, Ken Matthews, Chien-Hao Chen, Tat Ngai, Chang Yong Kang, Gennadi Bersuker, Saikumar Vivekanand, Martin Rodgers, Steven Gausepohl, Paul D. Kirsch, Raj Jammy
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4796138
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