Nano-structuring in SiGe by oxidation induced anisotropic Ge self-organization

Ethan Long, Augustinas Galeckas, Andrej Yu Kuznetsov, Antoine Ronda, Luc Favre, Isabelle Berbezier, Henry H. Radamson
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4794991
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