Fast and high resolution thermal detector based on an aluminum nitride piezoelectric microelectromechanical resonator with an integrated suspended heat absorbing element

  • Yu Hui, Matteo Rinaldi
  • Applied Physics Letters, March 2013, American Institute of Physics
  • DOI: 10.1063/1.4794074

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http://dx.doi.org/10.1063/1.4794074

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