Effects of polarization on four-beam laser interference lithography

  • Dapeng Wang, Zuobin Wang, Ziang Zhang, Yong Yue, Dayou Li, Carsten Maple
  • Applied Physics Letters, February 2013, American Institute of Physics
  • DOI: 10.1063/1.4793752

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http://dx.doi.org/10.1063/1.4793752

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