Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure

Kaiyu Cui, Yongzhuo Li, Xue Feng, Yidong Huang, Wei Zhang
  • AIP Advances, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4793082
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