Controlled polarity of sputter-deposited aluminum nitride on metals observed by aberration corrected scanning transmission electron microscopy

T. Harumoto, T. Sannomiya, Y. Matsukawa, S. Muraishi, J. Shi, Y. Nakamura, H. Sawada, T. Tanaka, Y. Tanishiro, K. Takayanagi
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4792942