Oxygen diffusivity in silicon derived from dynamical X-ray diffraction

J. Will, A. Gröschel, D. Kot, M. A. Schubert, C. Bergmann, H.-G. Steinrück, G. Kissinger, A. Magerl
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4792747