Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices

M. Zalazar, P. Gurman, J. Park, D. Kim, S. Hong, L. Stan, R. Divan, D. Czaplewski, O. Auciello
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4792238