Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices

  • M. Zalazar, P. Gurman, J. Park, D. Kim, S. Hong, L. Stan, R. Divan, D. Czaplewski, O. Auciello
  • Applied Physics Letters, March 2013, American Institute of Physics
  • DOI: 10.1063/1.4792238

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