Effects of suboxide layers on the electronic properties of Si(100)/SiO2 interfaces: Atomistic multi-scale approach

Byung-Hyun Kim, Gyubong Kim, Kihoon Park, Mincheol Shin, Yong-Chae Chung, Kwang-Ryeol Lee
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4791706