Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles

David Fernandez Rivas, Joris Betjes, Bram Verhaagen, Wilco Bouwhuis, Ton C. Bor, Detlef Lohse, Han J. G. E. Gardeniers
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4791582
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